Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10500693 | Run-to-run control for chemical mechanical planarization | Madhu Ramavajjala, Patrick D. Noll | 2019-12-10 |
| 9308620 | Permeated grooving in CMP polishing pads | Christopher Schutte | 2016-04-12 |