Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9308620 | Permeated grooving in CMP polishing pads | Prakash Lakshmikanthan | 2016-04-12 |
| 8663490 | Semiconductor wafer handler | George Wallace | 2014-03-04 |
| 7914694 | Semiconductor wafer handler | George Wallace | 2011-03-29 |
| 7134947 | Chemical mechanical polishing system | David Anthony Stark | 2006-11-14 |
| 6729947 | Semiconductor wafer handler | George Wallace | 2004-05-04 |