Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7567072 | Real-time monitoring of particles in semiconductor vacuum environment | — | 2009-07-28 |
| 5356758 | Method and apparatus for positively patterning a surface-sensitive resist on a semiconductor wafer | — | 1994-10-18 |
| 4826756 | Low temperature deep ultraviolet resist hardening process using zenon chloride laser | — | 1989-05-02 |
| 4770739 | Bilayer photoresist process | Cesar M. Garza | 1988-09-13 |