Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4659426 | Plasma etching of refractory metals and their silicides | Clyde R. Fuller, Gordon P. Pollack, Robert H. Eklund | 1987-04-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4659426 | Plasma etching of refractory metals and their silicides | Clyde R. Fuller, Gordon P. Pollack, Robert H. Eklund | 1987-04-21 |