| 9640478 |
Semiconductor device having low dielectric insulating film and manufacturing method of the same |
Osamu Okada, Takeshi Wakabayashi, Ichiro Mihara |
2017-05-02 |
| 9070638 |
Semiconductor device having low dielectric insulating film and manufacturing method of the same |
Osamu Okada, Takeshi Wakabayashi, Ichiro Mihara |
2015-06-30 |
| 8871627 |
Semiconductor device having low dielectric insulating film and manufacturing method of the same |
Osamu Okada, Takeshi Wakabayashi, Ichiro Mihara |
2014-10-28 |
| 8587124 |
Semiconductor device having low dielectric insulating film and manufacturing method of the same |
Osamu Okada, Takeshi Wakabayashi, Ichiro Mihara |
2013-11-19 |
| 7816790 |
Semiconductor device having low dielectric insulating film and manufacturing method of the same |
Osamu Okada, Takeshi Wakabayashi |
2010-10-19 |