Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7153542 | Assembly line processing method | Tue Nguyen, Craig Bercaw | 2006-12-26 |
| 6921555 | Method and system for sequential processing in a two-compartment chamber | Tue Nguyen, Craig Bercaw | 2005-07-26 |
| 6919101 | Method to deposit an impermeable film on porous low-k dielectric film | Zhihong Zhang, Tue Nguyen | 2005-07-19 |
| 6858085 | Two-compartment chamber for sequential processing | Tue Nguyen, Craig Bercaw | 2005-02-22 |
| 6756318 | Nanolayer thick film processing system and method | Tue Nguyen | 2004-06-29 |
| 6705816 | Wafer transport mechanism | Tue Nguyen | 2004-03-16 |
| 6670266 | Multilayered diffusion barrier structure for improving adhesion property | Tue Nguyen | 2003-12-30 |
| 6610169 | Semiconductor processing system and method | Tue Nguyen, Craig Bercaw | 2003-08-26 |