Issued Patents All Time
Showing 101–115 of 115 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4443096 | On machine reticle inspection device | Karl-Heinz Johannsmeier | 1984-04-17 |
| 4442388 | X-Y Addressable workpiece positioner having an improved X-Y address indicia sensor | — | 1984-04-10 |
| 4441517 | Apparatus for sonically facilitating the cleaning of oil storage and transport vessels | — | 1984-04-10 |
| 4425537 | X-Y Addressable workpiece positioner and mask aligner using same | Karl-Heinz Johannsmeier | 1984-01-10 |
| 4422755 | Frontal illumination system for semiconductive wafers | — | 1983-12-27 |
| 4413864 | Gas bearing | — | 1983-11-08 |
| 4393727 | Friction drive | — | 1983-07-19 |
| 4389701 | Illumination system | — | 1983-06-21 |
| 4383757 | Optical focusing system | — | 1983-05-17 |
| 4350428 | Shutter mechanism | — | 1982-09-21 |
| 4345836 | Two-stage wafer prealignment system for an optical alignment and exposure machine | — | 1982-08-24 |
| 4336917 | Shock and vibration isolation system | — | 1982-06-29 |
| 4328941 | Shock and vibration isolation system | Lawrence A. Wise | 1982-05-11 |
| 4311390 | Interferometrically controlled stage with precisely orthogonal axes of motion | — | 1982-01-19 |
| 4253746 | Process for forming a multifocal lens and lens formed thereby | — | 1981-03-03 |