Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4977361 | X-Y addressable workpiece positioner and mask aligner using same | Edward H. Phillips | 1990-12-11 |
| 4687980 | X-Y addressable workpiece positioner and mask aligner using same | Edward H. Phillips | 1987-08-18 |
| 4597664 | Step-and-repeat projection alignment and exposure system with auxiliary optical unit | Edward H. Phillips | 1986-07-01 |
| 4452526 | Step-and-repeat projection alignment and exposure system with auxiliary optical unit | Edward H. Phillips | 1984-06-05 |
| 4443096 | On machine reticle inspection device | Edward H. Phillips | 1984-04-17 |
| 4425537 | X-Y Addressable workpiece positioner and mask aligner using same | Edward H. Phillips | 1984-01-10 |
| 4414749 | Alignment and exposure system with an indicium of an axis of motion of the system | — | 1983-11-15 |
| 4408885 | Apparatus for the automatic alignment of two superimposed objects, e.g. a semiconductor wafer and mask | Paul E. Stoft, Tor G. Larsen | 1983-10-11 |
| 4259019 | Apparatus for the automatic alignment of two superimposed objects, for example a semiconductor wafer and a transparent mask | Paul E. Stoft, Tor G. Larsen | 1981-03-31 |