| 8025555 |
System for measuring and controlling the level of vacuum applied to a conditioning holder within a CMP system |
— |
2011-09-27 |
| 7913705 |
Cleaning cup system for chemical mechanical planarization apparatus |
— |
2011-03-29 |
| 7909910 |
Vacuum line clean-out separator system |
— |
2011-03-22 |
| 7901267 |
Method for controlling the forces applied to a vacuum-assisted pad conditioning system |
— |
2011-03-08 |
| 7575503 |
Vacuum-assisted pad conditioning system |
— |
2009-08-18 |
| 7544113 |
Apparatus for controlling the forces applied to a vacuum-assisted pad conditioning system |
— |
2009-06-09 |
| 7258600 |
Vacuum-assisted pad conditioning system |
— |
2007-08-21 |
| 7217172 |
Enhanced end effector arm arrangement for CMP pad conditioning |
— |
2007-05-15 |
| 7166014 |
Chemical mechanical planarization process control utilizing in-situ conditioning process |
Yuzhuo Li |
2007-01-23 |
| 7052371 |
Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning disk |
— |
2006-05-30 |
| 7040967 |
Multi-step, in-situ pad conditioning system and method for chemical mechanical planarization |
— |
2006-05-09 |
| 6508697 |
Polishing pad conditioning system |
Robert Benner |
2003-01-21 |
| 4622739 |
Method of providing an improved seal for thermostatic switch housings |
Radi Pejouhy, Joshua Loring |
1986-11-18 |