Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794302 | Dynamic feed forward temperature control to achieve CD etching uniformity | Li-Shiun Chen, Ming-Ching Chang, Huan-Just Lin, Li-Te Lin, Hun-Jan Tao | 2004-09-21 |
YC
Yung-Hog Chiu
Overall (All Time): #3,490,726 of 4,157,543Top 85%
1
Patents All Time