Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9048069 | Dosage accuracy monitoring systems of implanters | Juan Chen, Yung-Fu Yeh, Nai-Han Cheng | 2015-06-02 |
| 7206655 | System and method for acquiring semiconductor process status information | Chun-Ching Lin | 2007-04-17 |
| 6704659 | Seismic emergency response system for use in a wafer fabrication plant | Hsing-Hung Lee | 2004-03-09 |