Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12189304 | Method and structures for acoustic wave overlay error determination | Yu-Ching Lee | 2025-01-07 |
| 12055860 | Multi-function overlay marks for reducing noise and extracting focus and critical dimension information | Yu-Ching Lee, Te-Chih Huang | 2024-08-06 |
| 11835864 | Multi-function overlay marks for reducing noise and extracting focus and critical dimension information | Yu-Ching Lee, Te-Chih Huang | 2023-12-05 |
| 11837486 | Reticle transportation container | Yu-Ching Lee | 2023-12-05 |
| 11768443 | Method for manufacturing semiconductor structure | Yu-Ching Lee | 2023-09-26 |
| 11448975 | Multi-function overlay marks for reducing noise and extracting focus and critical dimension information | Yu-Ching Lee, Te-Chih Huang | 2022-09-20 |
| 11378892 | Overlay-shift measurement system | Yu-Ching Lee | 2022-07-05 |
| 11022889 | Overlay-shift measurement system and method for manufacturing semiconductor structure and measuring alignment mark of semiconductor structure | Yu-Ching Lee | 2021-06-01 |
| 11018037 | Optical reticle load port | Yu-Ching Lee | 2021-05-25 |
| 10998213 | Reticle transportation container | Yu-Ching Lee | 2021-05-04 |
| 10962888 | Structures for acoustic wave overlay error determination using periodic structures | Yu-Ching Lee | 2021-03-30 |
| 10915017 | Multi-function overlay marks for reducing noise and extracting focus and critical dimension information | Yu-Ching Lee, Te-Chih Huang | 2021-02-09 |
| 10658215 | Reticle transportation container | Yu-Ching Lee | 2020-05-19 |
| 10503082 | Optical reticle load port | Yu-Ching Lee | 2019-12-10 |
| 10497604 | Photomask transportation stage in semiconductor fabrication and method for using the same | Yu-Ching Lee, Yu-Wei Liao | 2019-12-03 |
| 10031412 | Pellicle assembly in photolithography process and method for using the same | Yu-Ching Lee | 2018-07-24 |