Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948810 | Apparatus for processing substrates or wafers | Li YIN, Yuling Chiu, Hung-Bin Lin | 2024-04-02 |
| 10748768 | Method for mandrel and spacer patterning | Yu-Chao Lin, Chao-Cheng Chen, Chun-Hung Lee | 2020-08-18 |
| 10157742 | Method for mandrel and spacer patterning | Yu-Chao Lin, Chao-Cheng Chen, Chun-Hung Lee | 2018-12-18 |
| 8920888 | Plasma process, film deposition method and system using rotary chuck | Ying Xiao, Chin-Hsiang Lin | 2014-12-30 |