XZ

Xi-Sheng Zhuang

TSMC: 1 patents #8,466 of 12,232Top 70%
Overall (All Time): #3,559,904 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6461979 LPCVD furnace uniformity improvement by temperature ramp down deposition system Chih-Hao Lin, Bu-Fang Chen, Song Chen 2002-10-08