Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461979 | LPCVD furnace uniformity improvement by temperature ramp down deposition system | Chih-Hao Lin, Bu-Fang Chen, Song Chen | 2002-10-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461979 | LPCVD furnace uniformity improvement by temperature ramp down deposition system | Chih-Hao Lin, Bu-Fang Chen, Song Chen | 2002-10-08 |