Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541339 | Nitride deposition wafer to wafer native oxide uniformity improvement for 0.35 flash erase performance by adding thermal oxide oxidation process | Chih-Hao Lin, Fei Cheng | 2003-04-01 |
| 6461979 | LPCVD furnace uniformity improvement by temperature ramp down deposition system | Chih-Hao Lin, Xi-Sheng Zhuang, Song Chen | 2002-10-08 |
| 5756392 | Method of formation of polycide in a semiconductor IC device | Hsiang-Fan Lu, Jhon Jhy Liaw, Chih-Ming Chen | 1998-05-26 |