Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841311 | Cleaning process for phase shift masks | Same-Ting Chen, Cheng-Shien Lee, Chin-Wang Hu, Chieh-Yuan Cheng, Hsiang-Chien HSU +1 more | 2005-01-11 |
| 6555277 | Quartz damage repair method for high-end mask | Same-Ting Chen, Tzy-Ying Lin | 2003-04-29 |