Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841311 | Cleaning process for phase shift masks | Same-Ting Chen, Cheng-Shien Lee, Chin-Wang Hu, Chieh-Yuan Cheng, Tzy-Ying Lin +1 more | 2005-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841311 | Cleaning process for phase shift masks | Same-Ting Chen, Cheng-Shien Lee, Chin-Wang Hu, Chieh-Yuan Cheng, Tzy-Ying Lin +1 more | 2005-01-11 |