Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393114 | Semiconductor apparatus and method of operating the same | Shih-Ming Chang, Chun-Hung Liu | 2025-08-19 |
| 11899367 | Dummy insertion for improving throughput of electron beam lithography | Shih-Ming Chang, Chun-Hung Liu, Chia-Hua Chang, Hsin-Wei Wu, Ta-Wei Ou +2 more | 2024-02-13 |
| 11899373 | Proximity effect correction in electron beam lithography | Shih-Ming Chang | 2024-02-13 |
| 11556058 | Proximity effect correction in electron beam lithography | Shih-Ming Chang | 2023-01-17 |
| 11543753 | Tunable illuminator for lithography systems | Ken-Hsien Hsieh, Shih-Ming Chang, Wei-Shuo Su, Hua-Tai Lin | 2023-01-03 |
| 11532730 | Method of forming a FinFET device by implantation through capping layer | Sun-Jay Chang | 2022-12-20 |
| 11526081 | Dummy insertion for improving throughput of electron beam lithography | Shih-Ming Chang, Chun-Hung Liu, Chia-Hua Chang, Hsin-Wei Wu, Ta-Wei Ou +2 more | 2022-12-13 |
| 11467488 | Semiconductor apparatus and method of operating the same | Shih-Ming Chang, Chun-Hung Liu | 2022-10-11 |
| 11054748 | Dummy insertion for improving throughput of electron beam lithography | Shih-Ming Chang, Chun-Hung Liu, Chia-Hua Chang, Hsin-Wei Wu, Ta-Wei Ou +2 more | 2021-07-06 |
| 10727319 | Dislocation SMT for FinFET device | Sun-Jay Chang | 2020-07-28 |
| 10095116 | Lithography system and lithography method for improving image contrast | Shih-Ming Chang | 2018-10-09 |
| 9616561 | Nail gun having a dry firing prevention device | An-Gi LIU, Guey-Horng Liou | 2017-04-11 |
| 9570587 | Dislocation stress memorization technique for FinFET device | Sun-Jay Chang | 2017-02-14 |