Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6248169 | Dual-cup coating apparatus | Deng-Guey Juang | 2001-06-19 |
| 6242757 | Capacitor circuit structure for determining overlay error | Kuo-Chyuan Tzeng | 2001-06-05 |
| 6219171 | Apparatus and method for stepper exposure control in photography | Yong-Shun Liao | 2001-04-17 |
| 6143621 | Capacitor circuit structure for determining overlay error | Kuo-Chyuan Tzeng | 2000-11-07 |
| 5985764 | Layer independent alignment system | Chuan-Chieh Lin | 1999-11-16 |
| 5843831 | Process independent alignment system | Bor-Ping Jang, Chih-Shih Wei | 1998-12-01 |
| 5756964 | Thermal processing apparatus | Chih-Hsien Hsu | 1998-05-26 |
| 5747817 | One-step method for on-line lithographic pattern inspection | — | 1998-05-05 |
| 5733691 | One-step method for on-line lithographic pattern inspection | — | 1998-03-31 |
| 5633505 | Semiconductor wafer incorporating marks for inspecting first layer overlay shift in global alignment process | Chu-Mei Lee | 1997-05-27 |
| 5545570 | Method of inspecting first layer overlay shift in global alignment process | Chu-Mei Lee | 1996-08-13 |