Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997401 | Method for forming a via profile of interconnect structure of semiconductor device structure | Che-Cheng Chang, Tai-Shin Cheng, Wei-Ting Chen | 2018-06-12 |
| 9761488 | Method for cleaning via of interconnect structure of semiconductor device structure | Tai-Shin Cheng, Che-Cheng Chang, Wei-Ting Chen | 2017-09-12 |
| 9536964 | Method for forming via profile of interconnect structure of semiconductor device structure | Che-Cheng Chang, Tai-Shin Cheng, Wei-Ting Chen | 2017-01-03 |
| 9425087 | Method for forming semiconductor device structure | Wei-Ting Chen, Che-Cheng Chang, Tai-Shin Cheng | 2016-08-23 |