Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421606 | Gas distribution assembly including positioning device | Vincent Hubert Bernard Gilles Babin | 2025-09-23 |
| 12077850 | Physical vapor deposition apparatus | Kuo-Lung HOU, Ming-Hsien Lin | 2024-09-03 |
| 12080587 | Apparatus for preventing backside peeling defects on semiconductor wafers | Yen-Yu Chen, Wei-Jen Chen, Yi-Chen Chiang, Tsang-Yang Liu, Chang-Sheng Lee +1 more | 2024-09-03 |
| 11955322 | Device for adjusting position of chamber and plasma process chamber including the same for semiconductor manufacturing | Ming-Che CHEN | 2024-04-09 |
| 11587802 | Semiconductor fabrication tool having gas manifold assembled by jig | Ming-Che CHEN, Wen-Tane Liao, Ming-Hsien Lin, Hai-Lin Lee, Chun-Yu Chen | 2023-02-21 |
| 10775289 | Gas detecting device | Hao-Jan Mou, Hung-Chun Hu, Young-Chih Kuo, Jui-Yuan Chu, Chien-Chih Huang +5 more | 2020-09-15 |
| 10748806 | Apparatus and system for preventing backside peeling defects on semiconductor wafers | Yen-Yu Chen, Wei-Jen Chen, Yi-Chen Chiang, Tsang-Yang Liu, Chang-Sheng Lee +1 more | 2020-08-18 |
| 10163676 | Apparatus and system for preventing backside peeling defects on semiconductor wafers | Yen-Yu Chen, Wei-Jen Chen, Yi-Chen Chiang, Tsang-Yang Liu, Chang-Sheng Lee +1 more | 2018-12-25 |
| 9803274 | Process kit of physical vapor deposition chamber and fabricating method thereof | Shih Wei Bih, Wei-Jen Chen, Yen-Yu Chen, Hsien-Chieh Hsiao, Chang-Sheng Lee +1 more | 2017-10-31 |
| 8343741 | Pelletization process to control filamentous fungi morphology for enhanced reactor rheology bioproduct formation | Yan Liu, Craig Frear, Shulin Chen | 2013-01-01 |