Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7091053 | In-line wafer surface mapping | — | 2006-08-15 |
| 6953608 | Solution for FSG induced metal corrosion & metal peeling defects with extra bias liner and smooth RF bias ramp up | Pong-Hsiung Leu, Yu-Min Chang, Fang Wen Tsai, Jo-Wei Chen, Chyi-Tsong Ni | 2005-10-11 |
| 6531415 | Silicon nitride furnace tube low temperature cycle purge for attenuated particle formation | Ren-Dou Lee | 2003-03-11 |