Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5868853 | Integrated film etching/chamber cleaning process | J. G. Chen, L. M. Huang, C. P. Fan | 1999-02-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5868853 | Integrated film etching/chamber cleaning process | J. G. Chen, L. M. Huang, C. P. Fan | 1999-02-09 |