LH

L. M. Huang

TSMC: 1 patents #8,466 of 12,232Top 70%
Overall (All Time): #3,641,455 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5868853 Integrated film etching/chamber cleaning process J. G. Chen, W. C. Chien, C. P. Fan 1999-02-09