Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7029928 | Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamber | Chung-Ju Hsieh, Hsi-Wen Liao, Kai-Hsin Liu | 2006-04-18 |
| 6860138 | Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamber | Chung-Ju Hsieh, Hsi-Wen Liao, Kai-Hsin Liu | 2005-03-01 |