Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7029928 | Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamber | Hsi-Wen Liao, Kai-Hsin Liu, Tsu-Kuang Hou | 2006-04-18 |
| 6860138 | Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamber | Hsi-Wen Liao, Kai-Hsin Liu, Tsu-Kuang Hou | 2005-03-01 |
| 6727994 | Z-axis monitoring apparatus for robot blade | Hsi-Wen Liao, Yi-Ming Lin | 2004-04-27 |