Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6690460 | Real time detection of cracked quartz window | Te-Chin Chiu, Richard Chen | 2004-02-10 |
| 6599759 | Method for detecting end point in plasma etching by impedance change | Jen-Yuan Yang, Wen-Bin Lin | 2003-07-29 |