Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9423359 | Wafer charging electromagnetic inspection tool and method of using | Ming-Sung Kuo, Chiun-Chieh Su, Chih-Shun Chu | 2016-08-23 |
| 9098894 | Defect determination in integrated circuit manufacturing process | Min-Sung Kuo, Chiun-Chieh Su | 2015-08-04 |
| 7205167 | Method to detect photoresist residue on a semiconductor device | Mei-Yen Li, Yung-Lung Hsu | 2007-04-17 |