Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9423359 | Wafer charging electromagnetic inspection tool and method of using | Ming-Sung Kuo, Chih-Shun Chu, To-Yu Chen | 2016-08-23 |
| 9098894 | Defect determination in integrated circuit manufacturing process | Min-Sung Kuo, To-Yu Chen | 2015-08-04 |