Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5780315 | Dry etch endpoint method | Ying-Chen Chao | 1998-07-14 |
| 5726497 | Upward plug filled via hole device | Ying-Chen Chao, Jin-Yuan Lee | 1998-03-10 |
| 5646071 | Equipment and method for applying a liquid layer | Shih-Ming Wang, Li-Chum Chen | 1997-07-08 |
| 5541131 | Peeling free metal silicide films using ion implantation | Chue-San Yoo | 1996-07-30 |
| 5413940 | Process of treating SOG layer using end-point detector for outgassing | Chung-An Lin, Ying-Chen Chao | 1995-05-09 |
| 5393685 | Peeling free metal silicide films using rapid thermal anneal | Chue-San Yoo | 1995-02-28 |
| 5385868 | Upward plug process for metal via holes | Ying-Chen Chao, Jin-Yuan Lee | 1995-01-31 |
| 5203957 | Contact sidewall tapering with argon sputtering | Chue-San Yoo, Sui-Hei Kuo | 1993-04-20 |