Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379674 | Method and apparatus for improving critical dimension variation | Ming-Hsun LIN, Yu-Hsiang Ho, Chi-Hung Liao, Jhun Hua Chen | 2025-08-05 |
| 11988972 | Method and apparatus for improving critical dimension variation | Ming-Hsun LIN, Yu-Hsiang Ho, Jhun Hua Chen, Chi-Hung Liao | 2024-05-21 |
| 11579539 | Method and apparatus for improving critical dimension variation | Ming-Hsun LIN, Yu-Hsiang Ho, Jhun Hua Chen, Chi-Hung Liao | 2023-02-14 |
| 9698014 | Photoresist composition to reduce photoresist pattern collapse | Tsung-Pao Chen, Sheng-Min Chuang | 2017-07-04 |
| 9651870 | Method and tool of lithography | Tsung-Pao Chen, Sheng-Min Chuang | 2017-05-16 |