SS

Simon Shu

TSMC: 1 patents #8,466 of 12,232Top 70%
Overall (All Time): #3,499,786 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6506098 Self-cleaning slurry arm on a CMP tool Hu Fu Dao Ho, Ying Liu, Yeong Shiang Hu, Ben Liu, Jing Lin 2003-01-14