Hu Fu Dao Ho

TSMC: 1 patents #8,466 of 12,232Top 70%

Overall (All Time): #3,499,785 of 4,157,543Top 85%

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Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
6506098	Self-cleaning slurry arm on a CMP tool	Ying Liu, Yeong Shiang Hu, Simon Shu, Ben Liu, Jing Lin	2003-01-14