Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7687211 | System and method for photolithography in semiconductor manufacturing | Shin-Rung Lu, Yi-Chuan Lo | 2010-03-30 |
| 7206721 | Methods and systems of offline measurement for process tool monitoring | Chih-Tsung Lin | 2007-04-17 |
| 7035705 | System and method for process contamination prevention for semiconductor manufacturing | Chih-Wei Hsu, Span Lu, Kuang-Huan Hsu, Chen-Yung Lin, Chun-Hung Lin | 2006-04-25 |
| 6947801 | Method and system for synchronizing control limit and equipment performance | Hui-Chen Chu, Hui-Wen Yang, Fu-Ching Yang | 2005-09-20 |
| 6865438 | Method of using time interval in IC foundry to control feed back system | Yi-Chuan Lo, Jimmy T. Hu, Chen-Yu Chang | 2005-03-08 |
| 4809597 | Circulatory system sterilizer | — | 1989-03-07 |