Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12128522 | Polishing head, chemical-mechanical polishing system and method for polishing substrate | Ren-Guei Lin, Feng-Inn Wu, Sheng-Chen Wang, Jung-Yu Li | 2024-10-29 |
| 11407083 | Polishing head, chemical-mechanical polishing system and method for polishing substrate | Ren-Guei Lin, Feng-Inn Wu, Sheng-Chen Wang, Jung-Yu Li | 2022-08-09 |
| 10328549 | Polishing head, chemical-mechanical polishing system and method for polishing substrate | Ren-Guei Lin, Feng-Inn Wu, Sheng-Chen Wang, Jung-Yu Li | 2019-06-25 |