SY

Shin-Kuei Yen

TSMC: 1 patents #8,466 of 12,232Top 70%
Overall (All Time): #3,710,360 of 4,157,543Top 90%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5604134 Particle monitoring method for plasma reactors with moving gas distribution housings Kuan-Hui Chang, Tzu-Min Peng, Po-Tao Chu 1997-02-18