Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5747379 | Method of fabricating seamless tungsten plug employing tungsten redeposition and etch back | Yuan-Chang Huang | 1998-05-05 |
| 5604134 | Particle monitoring method for plasma reactors with moving gas distribution housings | Tzu-Min Peng, Po-Tao Chu, Shin-Kuei Yen | 1997-02-18 |