Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830877 | Method for forming via and contact holes with deep UV photoresist | Ching-Tien Ma, Tsung-Chuan Chen | 2004-12-14 |
| 6583062 | Method of improving an aspect ratio while avoiding etch stop | Ching-Tien Ma, Tsung-Chuan Chen | 2003-06-24 |