Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12427622 | Polishing pad conditioning apparatus | Cheng-Ping Chen, Shih Chung Chen, Hung-Lin Chen | 2025-09-30 |
| 12412725 | Adjustable support for arc chamber of ion source | Po-Tang Tseng, Ching-Heng Yen, Tai-Kun Kao | 2025-09-09 |
| 12311498 | Monolithic platen | Tsung-Lung Lai, Cheng-Ping Chen, Shih Chung Chen | 2025-05-27 |
| 12138735 | Multi-layered windows for use in chemical-mechanical planarization systems | Shih Chung Chen, Yi-Shao Lin, Ya-Jen Sheuh, Hung-Lin Chen, Ren-Dou Lee | 2024-11-12 |
| 12002647 | Adjustable support for arc chamber of ion source | Po-Tang Tseng, Ching-Heng Yen, Tai-Kun Kao | 2024-06-04 |
| 11975421 | Single bodied platen housing a detection module for CMP systems | Tsung-Lung Lai, Cheng-Ping Chen, Shih Chung Chen, Rong-Long Hung | 2024-05-07 |
| 11919126 | Monolithic platen | Tsung-Lung Lai, Cheng-Ping Chen, Shih Chung Chen | 2024-03-05 |
| 11850702 | Chemical mechanical planarization membrane | Cheng-Ping Chen, Ren-Dou Lee, Tsung-Lung Lai, Tzi-Yi Shieh, Chien-Wei Chang | 2023-12-26 |
| 11618126 | Polishing pad conditioning apparatus | Cheng-Ping Chen, Shih Chung Chen, Hung-Lin Chen | 2023-04-04 |
| 11571782 | Single bodied platen housing a detection module for CMP systems | Tsung-Lung Lai, Cheng-Ping Chen, Shih Chung Chen, Rong-Long Hung | 2023-02-07 |
| 11267099 | Chemical mechanical planarization membrane | Cheng-Ping Chen, Ren-Dou Lee, Tsung-Lung Lai, Tzi-Yi Shieh, Chien-Wei Chang | 2022-03-08 |
| 11020837 | Monolithic platen | Tsung-Lung Lai, Cheng-Ping Chen, Shih Chung Chen | 2021-06-01 |
| 10661408 | Platen stopper | Yu-Feng Han, Cheng-Yi Huang, Fang-Chi Chien, Chen-shih Chung | 2020-05-26 |