Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5926722 | Planarization of shallow trench isolation by differential etchback and chemical mechanical polishing | C. H. Yu | 1999-07-20 |
| 5786262 | Self-planarized gapfilling for shallow trench isolation | Y. H. CHEN, C. H. Yu | 1998-07-28 |