Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5926722 | Planarization of shallow trench isolation by differential etchback and chemical mechanical polishing | S. M. Jang | 1999-07-20 |
| 5858879 | Method for etching metal lines with enhanced profile control | L. C. Chao, M. H. Huang | 1999-01-12 |
| 5807789 | Method for forming a shallow trench with tapered profile and round corners for the application of shallow trench isolation (STI) | Chao-Cheng Chen, C. S. Tsai | 1998-09-15 |
| 5786262 | Self-planarized gapfilling for shallow trench isolation | S. M. Jang, Y. H. CHEN | 1998-07-28 |