Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7384799 | Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices | Fei-Yun Chen, Yuh-Hwa Chang, Yuan-Pang Lee, Yuan-Ko Hwang, Shuh-Shun Chen | 2008-06-10 |