Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730580 | Silicon substrate wafer fabrication method employing halogen gettering material and/or plasma annealing | Sheng-Hsiung Chen, Shun-Long Chen, Hungtse Lin | 2004-05-04 |