Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7384486 | Chamber cleaning method | Liang-Gei Yao, Shih-Chang Chen | 2008-06-10 |
| 7037816 | System and method for integration of HfO2 and RTCVD poly-silicon | Yu-Min Lin, Ming-Fang Wang, Kun-Chih Lee, Liang-Gi Yo, Shih-Chang Chen +1 more | 2006-05-02 |