Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7354524 | Method and system for processing multi-layer films | Hui Yang, Chao-Cheng Chen, Hun-Jan Tao | 2008-04-08 |
| 7341943 | Post etch copper cleaning using dry plasma | Chen-Nan Yeh, Hun-Jan Tao | 2008-03-11 |
| 7033518 | Method and system for processing multi-layer films | Hui Yang, Chao-Cheng Chen, Hun-Jan Tao | 2006-04-25 |