Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046497 | Transfer system for wafer cassettes | Yi-Feng Yen, Shih-Lung Hsu, Cheng-Hsiung Tung | 2024-07-23 |
| 8944080 | Cleaning system, cleaning device, and method of using cleaning device | Yen-Shao Peng, Chia-Hao Hsueh | 2015-02-03 |
| 7601955 | Scanning electron microscope | Yang-Kuao Kuo | 2009-10-13 |
| 7206663 | Calibration cassette pod for robot teaching and method of using | Fu-Shun Lo, Yi-Chang Tsai | 2007-04-17 |
| 7054713 | Calibration cassette pod for robot teaching and method of using | Fu-Shun Lo, Yi-Chang Tsai | 2006-05-30 |
| 6926489 | Latch sensor for pod transport gripper | Yan-Ping Lee, Chi-Chung Chang, Fu-Shun Lo | 2005-08-09 |