Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9972520 | Aluminum nitride electrostatic chuck used in high temperature and high plasma power density semiconductor manufacturing process | Yi-Hsiuan Yu, Jian Ruan | 2018-05-15 |
| 9216906 | Method for manufacturing aluminum nitride powder | Yung-Han Huang, Cheng-Hung Shih, Lea-Hwung Leu | 2015-12-22 |
| 8920706 | Method for hot isostatic pressing a substrate | Chia-Yi Hsiang, Ching-Hui ChiangLin, Fu-Hsing Huang | 2014-12-30 |
| 8829537 | Integrated apparatus including driver chips, a power supply and LED chips on an isolative substrate | Chin-Peng Wang, Lea-Hwung Leu | 2014-09-09 |
| 8741211 | Method for making a wafer level aluminum nitride substrate | Ching-Hui ChiangLin, Te-Po Liu | 2014-06-03 |
| 8646706 | Method for protecting aluminum nitride from moisture | Chia-Yi Hsiang, Fu-Hsing Huang | 2014-02-11 |
| 8357345 | Method for removing oxygen from aluminum nitride by carbon | Chia-Yi Hsiang, Ching-Hui ChiangLin, Te-Po Liu | 2013-01-22 |
| 7601955 | Scanning electron microscope | Kuo-Hsing Teng | 2009-10-13 |
| 7283198 | Reticle thermal detector | — | 2007-10-16 |
| 7170578 | Pattern control system | — | 2007-01-30 |
| 6907742 | Apparatus and method for controlling wafer temperature | — | 2005-06-21 |
| 6832517 | Optical level detector | — | 2004-12-21 |