Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664189 | Removal of wafer edge defocus due to CMP | Feng-Inn Wu | 2003-12-16 |
| 5962193 | Method and apparatus for controlling air flow in a liquid coater | Dong-Hsu Cheng, Cheng-Wei Huang, Cheng-Ku Chen | 1999-10-05 |
| 5807660 | Avoid photoresist lifting by post-oxide-dep plasma treatment | Dong-Hsu Cheng | 1998-09-15 |