Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867933 | Method for forming semiconductor device structure with overlay grating | Long Chen, Chi-Wen Lai, Chia-Ching Liang, Kai-Hsiung Chen, Yu-Ching Wang +4 more | 2020-12-15 |
| 10734325 | Method for forming semiconductor device structure with overlay grating | Long Chen, Chi-Wen Lai, Chia-Ching Liang, Kai-Hsiung Chen, Yu-Ching Wang +4 more | 2020-08-04 |
| 10461037 | Method for forming semiconductor device structure with overlay grating | Long Chen, Chi-Wen Lai, Chia-Ching Liang, Kai-Hsiung Chen, Yu-Ching Wang +4 more | 2019-10-29 |
| 10204867 | Semiconductor metrology target and manufacturing method thereof | Long Chen, Hsin-Chin LIN, Hsiang-Yu SU, Yun-Heng Tseng, Kai-Hsiung Chen +4 more | 2019-02-12 |