Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6542839 | Apparatus and method for calibrating the position of a cassette indexer | Hsueh-Chin Lu, Chi-Wei Chang | 2003-04-01 |
| 5939618 | Apparatus and method for detecting leakage in a gas reactor | Tien J. Hu | 1999-08-17 |
| 5913183 | Check device for air activated pressure valve | Tain-Jenn Hu, Philip J. Lin | 1999-06-15 |
| 5811762 | Heater assembly with dual temperature control for use in PVD/CVD system | — | 1998-09-22 |